ECE5134

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ECE 5134 Fundamentals of MEMS

Electrcl & Comptr EngineeringSchool of Egr. and Comp. Sci.
Course InfoCreditsRepeat RulesRestrictions

Course Title

Fundamentals of MEMS

Course Description

Micro-electro-mechanical Systems (MEMS) specifications, MEMS materials, materials mechanics, MEMS fabrication technologies, lumped-element method and MEMS device modeling and dynamics, energy transductions for sensing and actuations, case study on sensors and actuators. Finite element analysis (FEA) for MEMS structural design, with projects. Cross-listed with ECE 4134. Credit cannot be received for both ECE 5134 and ECE 4134.

Equivalent Courses

ECE4134, ECE583

College/School

School of Egr. and Comp. Sci.