ECE5135

Microelectronic Fabrication Technologies

Modern microelectronics processes and fabrication of integrated circuits. Crystal growth and wafer preparation, photolithography, dielectric and polysilicon film deposition, epitaxial growth, oxidation, diffusion, ion implantation, etching, metallization and integrated circuits layout principles. Introduction to MOS-based and bipolar junction transistor-based microcircuits design and fabrication. Projects included.

ECE587

School of Egr. and Comp. Sci.